Browsing Electrical Engineering by Subject "Microelectronics"
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Laser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, Microelectronics, and Spacecraft Structures
(IEEE, 2006-11-20)The purpose of this paper is to present novel optical imaging techniques, based on all active optical polarimetric principles, for efficient detection, inspection, and monitoring of semiconductor components, microelectronic ...